MeasuringRange(測量范圍):X-axis:300mmY-axis:200mmZ-axis:150mm MeasuringUncertainty(測量精度):U2(X,Y)=2.0+L/250 mU1 (Z) =2.5+L/250 mResolution(分辨率):0.5 mSystemConstruction(系統(tǒng)構(gòu)造):Precisionlappedfinegranitebase(精密花崗巖平板)Highprecisioncrosstable(高精密度的十字桌)Moving stage(運(yùn)動軸承)DriveSystem(驅(qū)動系統(tǒng)):Backlashfreeballscrewsthroughmasscenter(探頭中心螺絲抗抖動（重液壓）)ServomotordriveforCNCof3-axis(DC伺服馬達(dá)CNC的3軸伺服馬達(dá))PrecisionLinearMotionguidesystem(精密線性運(yùn)動指導(dǎo)系統(tǒng))PositioningSpeed(傳送速度):0 300mm/secMax.acceleration(加速度):500mm/s